Optical beam homogenizer

G - Physics – 02 – B

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88/113

G02B 5/08 (2006.01) B23K 26/073 (2006.01) G02B 27/09 (2006.01)

Patent

CA 1188553

ABSTRACT OPTICAL BEAM HOMOGENIZER An optical beam homogenizer divides and re- directs an incident beam to provide uniform irradiation to a plane surface. The beam homogenizer is particu- larly useful in an apparatus and method for uniform laser irradiation of materials, The apparatus comprises a laser (30), a beam homogenizer (33), and a support (35) for the material (34) being irradiated. Depending on the system parameters, the apparatus is useful for metal hardening, semiconductor annealing, or other materials processing applications.

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