Silicon nitride sintered body having excellent...

Details Silicon nitride sintered body having excellent... Silicon nitride sintered body having excellent...

C - Chemistry, Metallurgy

04

B

261/1

C04B 35/58 (2006.01) C04B 35/584 (2006.01) C04B 35/593 (2006.01)

Patent

CA 1331022

ABSTRACT OF THE DISCLOSURE A silicon nitride sintered body having a composition of 1.5-3.0 weight % of Y2O3, 0.1-1.0 weight % of A?2O3 and balance substantially Si3N4, a weight ratio of Y2O3/A?2O3 being 2.5 or more, which has a density of 3.0 g/cm3 or more and has a structure in which the minor axes of grains are substantially 6 µm or less. This silicon nitride sintered body is produced by preparing a powder mixture containing Y2O3 powder, A?2O3 powder and silicon nitride powder in the above proportions, the silicon nitride powder having an oxygen content of 1.2 weight % or less, a specific surface area of 9-11 m2/g and a metal impurity content of 200 ppm or less; and sintering the powder mixture at a temperature of 1900-2100°C and a pressure of 5 kg/cm2 G or more in a nitrogen atmosphere.

609220

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