Thin film field effect transistor and method of making same

Details Thin film field effect transistor and method of making same Thin film field effect transistor and method of making same

H - Electricity

01

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356/149, 375/53

H01L 29/78 (2006.01) H01L 21/324 (2006.01) H01L 21/336 (2006.01) H01L 21/84 (2006.01) H01L 29/04 (2006.01) H01L 29/161 (2006.01) H01L 29/786 (2006.01)

Patent

CA 1230948

ABSTRACT There is disclosed a film field effect transistor which can be operated at fast switching rates for use, for example, in video display applications. The transistor includes a body of silicon semiconductor material having a structure more ordered than amorphous material and less ordered than single crystalline material. The source and drain of the transistor comprise rectifying contacts formed on the body of silicon semiconductor material. Also disclosed are a method of making the transistor and an electronically addressable array system utilizing the transistor to advantage.

479708

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