System for measuring carrier lifetime of semiconductor wafers

Details System for measuring carrier lifetime of semiconductor wafers System for measuring carrier lifetime of semiconductor wafers

G - Physics

01

R

356/117, 324/45

G01R 31/26 (2006.01) G01R 31/265 (2006.01)

Patent

CA 1225435

ABSTRACT OF THE DISCLOSURE A contactless rf technique for measurement of the carrier lifetime from the photoconductivity induced in silicon wafers by a flash of infrared light. The carrier lifetime is inferred from the photoconductivity decay.

436423

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