Monitoring a plurality of identical process parameters

Details Monitoring a plurality of identical process parameters Monitoring a plurality of identical process parameters

G - Physics

06

F

354/46, 354/93

G06F 17/40 (2006.01)

Patent

CA 1325279

ABSTRACT OF THE DISCLOSURE A method and apparatus for monitoring a plurality of processes which are identical with respect to at least one process parameter, employing a plurality of sensors each disposed for monitoring the one process parameter of a respective process, the sensors all having identical responses to the one process parameter. Monitoring is performed by: deriving (2-10) from the sensor responses a succession of response samples each derived from a respective sensor. Then each sample is monitored in succession and a predetermined characteristic of the sensor response represented by each sample is evaluated, the monitoring step being carried out in a processing path having an input to which all samples are applied in series and providing an output indication of the evaluating result for each sample. Finally, the indication of the evaluating result of each sample is interpreted in order to provide an indication of the status of each process.

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