Piezoelectric resonating device

Details Piezoelectric resonating device Piezoelectric resonating device

H - Electricity

03

H

333/89

H03H 9/17 (2006.01) H01L 41/22 (2006.01) H03H 3/02 (2006.01)

Patent

CA 1236182

PIEZOELECTRIC RESONATING DEVICE ABSTRACT The present invention provides a piezoelectric thin-film resonator comprising a non-piezoelectric film layer formed on a substrate, a lower electrode, a piezoelectric film layer and an upper electrode. An air-gap layer is formed between the non-piezoelectric film and the substrate to facilitate vibration of the piezoelectric film layer at the resonate frequency. The resulting resonating device is mechanically strong while at the same time being capable of operating at high frequency.

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