Pressure control apparatus for use in an integrated circuit...

H - Electricity – 01 – L

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356/188

H01L 21/66 (2006.01) G01R 1/067 (2006.01)

Patent

CA 1272528

PRESSURE CONTROL APPARATUS FOR USE IN AN INTEGRATED CIRCUIT TESTING STATION ABSTRACT OF THE DISCLOSURE An apparatus for controlling the pressure exerted on a probe in an integrated ciruit testing station is disclosed. The apparatus is mounted to a support structure within the station directly above the probe. The testing station further includes lift means for moving an integrated circuit upward against the probe for testing. The invention uses a pressure pad positioned directly above the probe which is attached to the support structure using a resilient member. Associated with the pad is an electrical contact system connected to the lift means. As the lift means moves the circuit upward, it contacts the probe which pushes against the pad. Movement of the probe and circuit against the pad permits secure engagement of the probe with the circuit. As the circuit continues to move upward, the pad is urged upward, causing the electrical contact system to deactivate the lift means before damage to the probe occurs.

545700

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