Isolation valve

Details Isolation valve Isolation valve

B - Operations, Transporting

01

J

137/148, 204/175

B01J 19/08 (2006.01) C23C 14/56 (2006.01) C23C 16/54 (2006.01) F16J 15/16 (2006.01) F16K 51/00 (2006.01)

Patent

CA 1191107

Abstract of the Disclosure A valve for isolating the interior of a glow discharge chamber from the atmosphere and other reactants. The valve includes a body mounted in an aperture of the chamber. A slit-like opening is provided therein to allow the interior of the chamber to communicate with interrelated elements of a deposition system. A source is provided for introducing inert gas into the opening under pressure somewhat greater than that of reaction gases and plasma within the chamber to create an effective, non-reactive gas curtain.

396699

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