G - Physics
03
B
88/96
G03B 21/00 (2006.01) G02B 19/00 (2006.01) G03F 7/20 (2006.01)
Patent
CA 1254782
CONDENSER SYSTEM by RONALD S . HERSHEL ABSTRACT OF THE DISCLOSURE A condenser useful in ring-field optics includes a device for homogenizing light with little or no change in light cone angle, or in the polar distribution of light linked to a device for channeling the light emerging from the homogenizing device equally, but with variable intensity, into an arc of light spots having a predetermined intensity, radius, width and direction, a device magnifying the width of the arc of light spots, and for reducing proportionately its cone angle in the direction of its width while converting its shape from elliptical to circular with substantially symmetrical distribution of light, a device for trans- ferring the circular arc of light spots to, and focusing the arc at an image plane while homogenizing the light along the length of the arc, and a device for easily changing arc radius. This condenser may include an autocollimator for aligning the condenser elements with one another, and with the projection optics of a photolithographic device.
456230
Borden Ladner Gervais Llp
Hershel Ronald S.
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