C - Chemistry – Metallurgy – 22 – C
Patent
C - Chemistry, Metallurgy
22
C
117/85
C22C 1/00 (2006.01) C22C 28/00 (2006.01) C23C 16/06 (2006.01) C23C 16/30 (2006.01) C30B 25/02 (2006.01)
Patent
CA 1172524
- 1 - ABSTRACT OF THE DISCLOSURE A method of depositing a group III element - group V element compound or alloy on a hot substrate using a metal organic chemical vapour deposition procedure. Attempts to apply an MOCVD procedure to the production of a group III element - group V element compound from alkyl derivatives of group III elements which are strong lewis acids and group V element hydrides have met with limited success. This is because the reactants react in the cold gas phase to form an involatile polymer which does not give the required product on the hot substrate. The present invention proposes modifying the alkyl deriv- ative of the group III element to be a weaker lewis acid. This can be achieved by either substituting an electron donating group for one of the alkyl groups bonded to the group III element or by combining the group III element alkyl derivative with an alkyl derivative of a group V element thereby forming a volatile compound. Both the substituted alkyl - 2 - derivative of the group III element and the vola- tile alkylated group III - V compound give the required product when used in admixture with a group V element hydride in an MOCVD process.
390177
Faktor Marc M.
Moss Rodney H.
British Telecommunications Public Limited Company
Ridout & Maybee Llp
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