Vibration compensating interferometer mirror drive system

G - Physics – 01 – N

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G01N 21/25 (2006.01) G01J 3/453 (2006.01) G02B 26/08 (2006.01)

Patent

CA 1197991

Abstract: Vibration-compensating interferometer mirror drive system An interferometer mirror drive system compensates for velocity and tilt errors induced by ambient vibra- tion, as well as providing long-term automatic align- ment of the mirrors. A uniquely configured .lambda./8-thick step on the fixed mirror of the interferometer intro- duces a 90-degree phase shift in one of two reference light beams, to produce quadrature signals which characterize the relative motion between the fixed and the driven mirrors. An electronic circuit extracts velocity and tilt data from the quadrature signals and develops error signals indicative of deviations from the desired coordinates of the moving mirror. The error signals are used to generate a set of control signals which in turn are supplied to an arrangement of drive coils attached to the moving mirror, to re- store the mirror to the desired coordinates.

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