Automated opening and closing of ultra clean storage containers

Details Automated opening and closing of ultra clean storage containers Automated opening and closing of ultra clean storage containers

B - Operations, Transporting

65

G

B65G 49/05 (2006.01) H01L 21/677 (2006.01)

Patent

CA 2335313

A substrate handling system is provided with a robot (78) having the dual functions of removing and replacing substrate-containing pod doors (38) and load lock chamber doors (40), and of transporting the substrates between the pods (81-84) and various processing stations (75-77). The robot is equipped with an end effector (58) having sockets (67-69) into which interchangeable tools (60, 66) for implementing the various functions are removably mounted. The tools are retrieved from various parking locations disposed within the system micro-environment, and automatic interchangeability of the tools is facilitated by a novel socket mechanism which engages and disengages the tools to the robot arm (80) without introducing contaminants into the micro-environment.

Un système de manipulation de substrat est proposé, avec un robot (78) muni des doubles fonctions d'enlever et de remplacer des portes de conteneur modulable contenant du substrat (38) et de charger des portes de sas mobile (40), et de transporter les substrats entre les conteneurs (81-84) et divers postes de traitement (75-77). Le robot est muni d'un effecteur (58) possédant des embouts (67-69) dans lesquels on peut monter des outils interchangeables (60, 66) pour pouvoir mettre en ouvre les diverses fonctions. Les outils sont extraits de différents emplacements de stationnement disposés à l'intérieur du microenvironnement du système et l'interchangeabilité des outils est facilitée par un nouveau mécanisme de raccords qui permet d'enclencher et de déclencher les outils dans le bras du robot (80) sans introduire de contaminants dans le microenvironnement.

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