Monochromator and optical analyzing device using the same

G - Physics – 02 – B

Patent

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Details

G02B 26/00 (2006.01) G01J 3/06 (2006.01) G01J 3/12 (2006.01) G02B 5/20 (2006.01)

Patent

CA 2269011

A monochromator according to the present invention has an arm 1 rotatably mounted on a rotation shaft 3, and a diffraction grating 6 is fixed to the arm 1. The arm 1 is rotated by a linear motor 9 including a moving part 91 fixed to the arm 1 and a stator part 92 fixed to a base 2. The linear motor 9 is a voice-coil linear motor constructed to allow the arm 1 to rotate reciprocatively around the rotation shaft 3 within a preset angular range. The absolute rotational position of the arm 1 is detected by a rotary encoder 7 including a crossbar 71 fixed to the arm 1 and a encoder block 72 fixed to the base 2. Based on the output signal of the rotary encoder 7, the linear motor 9 is controlled so that the moving part 92 rotates at a fixed angular speed around the rotation axis 3. Thus, the wavelength scanning is carried out at high speed, and sampling of monochromatic light having desired wavelengths is performed accurately.

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