Method for preparing hollow microchannels and product

F - Mech Eng,Light,Heat,Weapons – 28 – F

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F28F 3/12 (2006.01) B41J 2/02 (2006.01) B41J 2/16 (2006.01) C25D 1/02 (2006.01) F28D 9/00 (2006.01) G01N 30/60 (2006.01) G01N 35/10 (2006.01)

Patent

CA 2267289

The present invention is directed to methods for preparing devices having hollow metallic microchannels (20) on a surface of a planar substrate (10). More specifically, the present invention is directed to methods for preparing devices having surface metallic microchannels with a range of widths and heights selected to provide efficient flow characteristics and having thick and, thus, strong and durable channel walls. In addition, the methods of the present invention are compatible with standard integrated circuit fabrication techniques and, because the microchannels (20) are formed upon the surface of the substrate (10) without degrading the surface planarity, these techniques can be used to incorporate electronic circuitry into the microchannel- containing devices. For purposes of this application, the term "microchannel" refers to enclosed or partially enclosed channels having heights within the range from about 2 to about 200 micrometers (µm) and widths within the range of about 10 micrometers to about 2 millimeters.

L'invention concerne des procédés qui permettent de préparer des dispositifs comportant des microcanaux (20) métalliques creux à la surface d'un substrat plan (10). Plus spécifiquement, elle concerne des procédés qui permettent de préparer des dispositifs comportant des microcanaux métalliques superficiels pour lesquels les plages de largeur et de hauteur sont sélectionnées de façon à donner un régime d'écoulement efficient, et ayant des parois de canaux épaisses et donc résistantes et durables. Ces procédés sont compatibles avec les techniques standards de fabrication de circuits imprimés et, du fait que les microcanaux (20) sont formés à la surface du substrat (10) sans entraîner de dégradation de la planéité de surface, ils peuvent être utilisés pour placer un circuit électronique dans les dispositifs contenant les microcanaux. Dans cette application, le terme de "microcanal" désigne des canaux fermés ou partiellement fermés dont la hauteur est comprise entre 2 et 200 micromètres environ (µm) et la largeur entre 10 micromètres et 2 millimètres environ.

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