Vertical cavity surface emitting laser having multiple...

Details Vertical cavity surface emitting laser having multiple... Vertical cavity surface emitting laser having multiple...

H - Electricity

01

S

H01S 4/00 (2006.01)

Patent

CA 2581614

A VCSEL with undoped mirrors. An essentially undoped bottom DBR mirror is formed on a substrate. A periodically doped first conduction layer region is formed on the bottom DBR mirror. The first conduction layer region is heavily doped at a location where the optical electric field is at about a minimum. An active layer, including quantum wells, is on the first conduction layer region. A periodically doped second conduction layer region is connected to the active layer. The second conduction layer region is heavily doped where the optical electric field is at a minimum. An aperture is formed in the epitaxial structure above the quantum wells. A top mirror coupled to the periodically doped second conduction layer region. The top mirror is essentially undoped and formed in a mesa structure. An oxide is formed around the mesa structure to protect the top mirror during wet oxidation processes.

L'invention concerne un laser à cavité verticale et à émission par la surface (VCSEL) à miroirs non dopés. Un miroir DBR inférieur essentiellement non dopé est formé sur un substrat. Une première zone à couche de conduction périodiquement dopée est formée sur le miroir DBR inférieur. La première zone à couche de conduction est fortement dopée à un emplacement où le champ électrique optique est quasiment au minimum. Une couche active, qui comporte des puits quantiques, se trouve sur la première zone à couche de conduction. La seconde zone à couche de conduction, qui est reliée à la couche active, est fortement dopée à un emplacement où le champ électrique optique est au minimum. Une ouverture est formée dans la structure épitaxiale au-dessus des puits quantiques. Un miroir supérieur, couplé à la seconde zone à couche de conduction périodiquement dopée, est essentiellement non dopé et formé en une structure mesa. Un oxyde se forme autour de la structure mesa pour protéger le miroir supérieur lors de processus d'oxydation par voie humide.

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