Pressure sensor

G - Physics – 01 – L

Patent

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Details

G01L 9/06 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2352241

The invention relates to a pressure sensor consisting of a chip (11) which is mounted on a support wall (10) and which is provided with a resistance unit consisting of strip conductors and being arranged at the lower side (13) of a substrate (12). Said lower side faces the support wall (10). The resistance unit is located on a thin membrane (18). A recess (19) is located behind said membrane. The chip (11) is fixed on the support wall (10) by means of an elastic intermediate layer (26). The electrical components of the chip are protectively arranged between the substrate (12) and the support wall (10). The invention provides for an extremely flat sensor unit without additional sensor housing. Said sensor unit can even be used for measuring pressures in electrically conductive mediums.

L'invention concerne un détecteur de pression comprenant une puce (11) fixée sur une paroi de support (10). Cette puce (11) présente un ensemble résistance constitué de tracés conducteurs et placé sur le côté inférieur (13), orienté vers la paroi de support (10), d'un substrat (12). Cet ensemble résistance se trouve sur une membrane mince (18) derrière laquelle se trouve un évidement (19). Cette puce (11) est fixée au moyen d'une couche intermédiaire élastique (26) sur la paroi de support (10). Les composants électriques de la puce sont logés de manière à être protégés entre le substrat (12) et la paroi de support (10). L'invention permet de réaliser un dispositif détecteur extrêmement plat sans faire appel à un boîtier de détecteur supplémentaire, ledit dispositif pouvant même s'utiliser pour mesurer des pressions dans des milieux électroconducteurs.

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