Potassium hydrogen peroxymonosulfate solutions

Details Potassium hydrogen peroxymonosulfate solutions Potassium hydrogen peroxymonosulfate solutions

C - Chemistry, Metallurgy

01

B

C01B 15/08 (2006.01) C23F 1/18 (2006.01) H01L 21/3213 (2006.01) H05K 3/38 (2006.01) H01L 21/321 (2006.01)

Patent

CA 2517511

A solution comprising potassium hydrogen peroxymonosulfate containing an elevated level of KHSO5 and having a weight ratio of SO5 to SO4 of greater than 1.0:1, and its use in microetching metal substrates is disclosed.

La présente invention concerne une solution comprenant du peroxymonosulfate d'hydrogène potassium qui contient un niveau élevé de KHSO¿5 ?et un rapport en poids? ¿de SO¿5? par rapport à SO¿4? supérieur à 1,0 :1; et son utilisation pour effectuer la micro-gravure de substrats métalliques. ?¿

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