Method of using an atomic force microscope and microscope

Details Method of using an atomic force microscope and microscope Method of using an atomic force microscope and microscope

G - Physics

01

Q

G01Q 60/32 (2010.01)

Patent

CA 2613515

The invention relates to a method of using an atomic force microscope and to a microscope. The inventive method comprises the following steps consisting in at least performing bimodal excitation of a microlever (M) which is disposed on a sample and analysing at least: the variation in the oscillation amplitude (Ai) of an output signal (Aicos(.omega.it-.phi.i)) that is representative of the response from the microlever (M) to the excitation of one of the natural vibration modes thereof, in order to obtain topographic information in relation to the sample; and the variation in the phase (.phi.j) of an output signal (Ajcos(.omega.jt-.phi.j)) that is representative of the response from the microlever (M) to the excitation of another natural vibration mode thereof, in order to obtain compositional information in relation to the sample. The inventive microscope is adapted to be used with the aforementioned method.

L'invention décrit un procédé qui consiste à réaliser une excitation bimode minimale d'un microlevier (M), à le disposer sur un échantillon et à analyser la variation d'amplitude minimale (A ) d'oscillation d'un signal de sortie (A cos(.omega. t-.phi. )) représentatif de la réponse dudit microlevier (M) à l'excitation d'un de ses modes naturels de vibration, pour obtenir l'information topographique dudit échantillon, et la variation de la phase (.phi.j) d'un signal de sortie (Ajcos(.omega. t-.phi.j)) représentatif de la réponse dudit microlevier (M) à l'excitation d'un autre de ses modes naturels de vibration, pour obtenir l'information de composition dudit échantillon. Le microscope selon l'invention convient à une utilisation selon le procédé décrit précédemment.

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