Substrate cassette

Details Substrate cassette Substrate cassette

B - Operations, Transporting

65

G

B65G 49/06 (2006.01) H01L 21/67 (2006.01)

Patent

CA 2644914

The present invention relates to a substrate cassette (12) that houses a plurality of horizontally oriented substrates (14) in multiple levels in the vertical direction and in which support bars (20) are arranged that support the substrates so as to inhibit bending of the central portion of each substrate, wherein a vertical direction adjustment mechanism (110) that adjusts distortion of the support bars in the vertical direction is provided between the support bars and a frame (18) formed on the back of the opposite side from the substrate insertion side.

L'invention concerne une cassette de substrat logeant plusieurs substrats orientés horizontalement dans plusieurs niveaux dans le sens vertical et dans laquelle des barres support sont disposées, lesquelles supportent les substrats de manière à inhiber le pliage de la partie centrale de chaque substrat, un mécanisme de réglage du sens vertical réglant la distorsion des barres support dans le sens vertical étant placé entre les barres support et un cadre formé sur le dos du côté opposé au côté d'insertion du substrat.

Affiliated with

Also associated with

Rating

Substrate cassette does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate cassette, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate cassette will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1436185