A method of making a high reflectivity micro mirror and a...

Details A method of making a high reflectivity micro mirror and a... A method of making a high reflectivity micro mirror and a...

G - Physics

02

B

G02B 5/08 (2006.01) C25D 7/08 (2006.01)

Patent

CA 2314783

A high reflectivity micro mirror and method of making the same. The high reflectivity micro mirror is a monolithic bulk crystal silicon body having exterior surfaces and several planes. Mirror surfaces are provided in the body of the crystal silicon whereby the mirror surfaces can be used in light beam deflection and switching.

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