Dual stage deformable mirror

G - Physics – 02 – B

Patent

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Details

G02B 26/00 (2006.01) G02B 26/06 (2006.01)

Patent

CA 2362460

A multistage stage deformable mirror structure (10) includes a backup structure (12) having a support surface; a single mirror facesheet (18) having an optical surface (18A); and, interposed between the support surface and the optical surface, at least one intermediate deformable structure (14) that is coupled at a first surface to the support surface through a first set of linear actuators (16) for being deformed by the set first set of actuators. The at least one intermediate deformable structure is also coupled at a second opposing surface to the optical surface through a second set of linear actuators (20) for deforming the optical surface. The optical surface assumes a shape that is a combination of the deformation imparted to the at least one intermediate deformable structure by the first set of linear actuators, and the deformation imparted to it by the second set of linear actuators. The first set of linear actuators have a wider dynamic range than the second set of linear actuators, and the optical surface is deformed so as to simultaneously compensate an incident wavefront for both large and small magnitude and low and high temporal and spatial frequency wavefront errors. The first set of linear actuators operate with a lower bandwidth, and are spaced at wider intervals, than the second set of linear actuators.

L'invention concerne une structure de miroir (10) d~formable multi-~tage comprenant une structure d'appui (12) poss~dant une surface de support, une feuille protectrice (18) poss~dant une surface optique (18A), et, entre la surface de support et la surface optique, au moins une structure d~formable (14) interm~diaire coupl~e ~ une premi­re surface ~ la surface de support via un premier ensemble d'organes d'entra¹nement lin~aires (16), destin~e ~ Útre d~form~e par le premier ensemble d'organes d'entra¹nement. La structure d~formable interm~diaire est ~galement coupl~e, ~ une seconde surface oppos~e, ~ la surface optique, via un second ensemble d'organes d'entra¹nement (20) destin~ ~ d~former la surface optique. La surface optique adopte une forme qui est une combinaison de la d~formation de la structure d~formable interm~diaire induite par le premier ensemble d'organes d'entra¹nement lin~aires et de la d~formation induite par le second ensemble d'organes d'entra¹nement lin~aires. Le premier ensemble d'organes d'entra¹nement lin~aires pr~sente une gamme dynamique plus large que le second ensemble d'organes d'entra¹nement lin~aires, et la surface optique est d~form~e de fa×on ~ compenser simultan~ment un front d'ondes incident de grande et petite longueur et les erreurs de fronts d'ondes de fr~quences temporelles et spatiales basses et ~lev~es. Le premier ensemble d'organes d'entra¹nement lin~aires fonctionne avec une largeur de bande inf~rieure ~ celle du second ensemble d'organes d'entra¹nement lin~aires, et les premiers organes d'entra¹nement lin~aires sont espac~s par de plus grands intervalles que les seconds organes d'entra¹nement lin~aires.

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