Slip free vertical rack design having rounded horizontal arms

Details Slip free vertical rack design having rounded horizontal arms Slip free vertical rack design having rounded horizontal arms

H - Electricity

01

L

H01L 21/68 (2006.01) H01L 21/673 (2006.01)

Patent

CA 2318968

The invention relates to a vertical rack for semiconductor wafer processing having strictly horizontally disposed arms wherein each arm has a rounded tip and a smooth (Ra < 1 µm) upper surface.

La présente invention concerne un châssis vertical pour le traitement des plaquettes à semi-conducteurs. Les bras de ce châssis sont strictement horizontaux, leurs extrémités étant arrondies, et leurs surfaces supérieures lisses (Ra < 1 < mu >m).

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