Alignment unit control apparatus and alignment method

Details Alignment unit control apparatus and alignment method Alignment unit control apparatus and alignment method

H - Electricity

01

L

H01L 21/02 (2006.01) H01L 21/60 (2006.01) B81C 3/00 (2006.01)

Patent

CA 2732286

An alignment unit control apparatus according to the present invention includes: an imaging section configured to control cameras to image a plurality of regions on a surface of a substrate to generate a plurality of images; a region detecting section configured to select a detection region from the plurality of regions based on the plurality of images; and an aligning section configured to align the substrate based on an alignment image obtained by imaging a mark of the substrate in the detection region by one of the plurality of cameras. For this reason, the alignment unit control apparatus does not need to have another mechanism for the purpose of positioning the mark for alignment in the field of vision of the camera, and can more easily be manufactured, and a region of an alignment mark can be detected more easily.

Linvention concerne une unité de commande de dispositif dalignement comprenant une unité dimagerie qui prend de multiples images représentant respectivement de multiples régions de la surface dun substrat en utilisant une caméra, une unité de détection de régions qui choisit des régions détectées parmi les multiples régions à partir des multiples images, et une unité dalignement qui aligne le substrat en fonction dune image dalignement prise par ladite caméra et qui représente des marques formées sur les régions détectées. Ainsi, il n'est pas nécessaire que lunité de commande de dispositif dalignement comporte un mécanisme séparé de pose de marques que lon utilise pour lalignement dans le champ visuel de ladite caméra, ce qui permet de diminuer la taille et de faciliter la production tout en facilitant la détection de régions avec des marques dalignement.

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