Removal of surface contaminants by irradiation

Details Removal of surface contaminants by irradiation Removal of surface contaminants by irradiation

H - Electricity

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L

H01L 21/268 (2006.01) B08B 5/00 (2006.01) B08B 7/00 (2006.01) B08B 11/00 (2006.01) B23K 26/14 (2006.01) G03F 7/20 (2006.01) H01L 21/00 (2006.01) H01L 21/302 (2006.01) H01L 21/306 (2006.01) H01L 21/3205 (2006.01) H01L 21/321 (2006.01) H01L 21/64 (2006.01) H01L 21/768 (2006.01)

Patent

CA 2132332

An apparatus for removing surface contaminants from a planar or irregularly shaped surface of a substrate (12, 70) by high-energy irradiation isprovided. The invention enables removal of surface contaminants without alteringthe underlying molecular crystal structure of the substrate (12, 70). The source of high-energy irradiation include a pulsed or continuous wave laser (14) or high-energy lamp (59).

Appareil permettant d'éliminer des contaminants de la surface d'un substrat (12, 70) plan ou de forme irrégulière par irradiation à haute intensité. L'invention permet d'éliminer des contaminants de la surface sans altérer la structure cristalline moléculaire sous-jacente du substrat (12, 70). La source d'irradiation de haute intensité consiste en un laser (14) à impulsions ou à ondes continues ou en une lampe (59) à forte intensité.

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