Moisture-free sog process

Details Moisture-free sog process Moisture-free sog process

H - Electricity

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117/102, 32/27,

H01L 21/56 (2006.01) B05C 11/08 (2006.01) B05D 3/12 (2006.01) B05D 5/12 (2006.01) H01L 21/00 (2006.01) H01L 21/312 (2006.01) H01L 21/316 (2006.01) H01L 23/29 (2006.01)

Patent

CA 2017719

A method is disclosed for applying spin-on glass (SOG) to a substrate over low-melting point, non-refractory materials such as aluminum. The spin-on glass is applied to the substrate in a moisture-free environment to minimize reverse hydrolysis during curing. This results in the formation of higher quality films, especially from inorganic SOGs.

Cette invention concerne une méthode de dépôt de verre par rotation sur un substrat en matériau non réfractaire à bas point de fusion tel que l'aluminium. Le dépôt de verre par rotation se fait sous atmosphère exempte d'humidité pour minimiser l'hydrolyse inverse en cours de cuisson. Cette façon de faire donne des pellicules de meilleure qualité, en particulier dans le cas de verres inorganiques.

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