Methods for introduction of a reactive material into a...

Details Methods for introduction of a reactive material into a... Methods for introduction of a reactive material into a...

B - Operations, Transporting

01

J

B01J 4/00 (2006.01) B01J 3/03 (2006.01)

Patent

CA 2684142

Methods for the introduction of a reactive material into a vacuum chamber while minimizing or eliminating the simultaneous introduction of contaminating materials or substances. As a result, contaminating materials and substances that can interfere with any measurements or other processes that occur in the vacuum chamber are minimized or eliminated.

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