B - Operations – Transporting – 05 – D
Patent
B - Operations, Transporting
05
D
117/114, 117/128
B05D 3/02 (2006.01) B05D 5/12 (2006.01) C09D 183/04 (2006.01) C23C 16/24 (2006.01) C23C 16/30 (2006.01) C23C 16/50 (2006.01) H01L 21/56 (2006.01) H01L 23/29 (2006.01)
Patent
CA 2027031
HERMETIC SUBSTRATE COATINGS IN AN INERT GAS ATMOSPHERE ABSTRACT The present invention relates to a method of forming a ceramic or ceramic-like coating on a substrate in the absence of oxygen. The method comprises coating the substrate with a solution comprising a solvent and one or more preceramic materials selected from the group consisting of hydrogen silsesquioxane and hydrolyzed or partially hydrolyzed RxSi(OR)4-x wherein R is independently selected from the group consisting of alkyl, aryl and unsaturated hydrocarbons and x is 0-2. The solvent is evaporated and a preceramic coating thereby deposited on the substrate. The preceramic coating is then ceramified by heating the coated substrate to a temperature of between about 500 up to about 1000°C. under an inert gas atmosphere to thereby produce a ceramic or ceramic-like coating on the substrate. The process of the invention is useful for forming protective coatings on any substrate prone to oxidation at the temperature necessary for ceramification. The present invention also relates to the formation of additional ceramic coatings on the ceramic or ceramic-like coating formed above.
Dow Corning Corporation
Gowling Lafleur Henderson Llp
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