Magnetically driven vibrating beam force transducer

Details Magnetically driven vibrating beam force transducer Magnetically driven vibrating beam force transducer

G - Physics

01

L

73/42, 73/69

G01L 1/10 (2006.01) G01L 1/18 (2006.01) G01P 15/08 (2006.01) G01P 15/097 (2006.01) G01P 15/10 (2006.01)

Patent

CA 2010607

MAGNETICALLY DRIVEN VIBRATING BEAM FORCE TRANSDUCER Abstract of the Disclosure A vibrating beam force transducer that can be realized in a silicon micro- machined device such as a micromachined accelerometer. The transducer includes a beam (18) having a longitudinal axis (16), and a drive circuit (24) electrically coupled to the beam for causing the beam to oscillate at a resonantfrequency that is a function of a force applied along the longitudinal beam axis. The drive circuit provides an electrical current to the beam, and the beam, or aconductive portion (18) thereof, conducts the current along a path that includes an axial component parallel to the longitudinal axis. A magnetic field (B) is created intersecting the axial component, such that the electric current interacts with the magnetic field to produce a force that causes the beam to oscillate at the resonant frequency. In a preferred embodiment, the transducer has a double ended tuning fork configuration, and the current path extends along one beam andback along the other beam.

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