Methods and apparatus for altering material using ion beams

Details Methods and apparatus for altering material using ion beams Methods and apparatus for altering material using ion beams

H - Electricity

01

J

H01J 27/00 (2006.01) B29C 59/16 (2006.01) C23C 8/36 (2006.01) C23C 14/48 (2006.01) H01J 27/14 (2006.01) B29C 35/08 (2006.01)

Patent

CA 2176339

A method and apparatus for treating material smfaces (13) using a repetitively pulsed ion beam (11). In particular, the treatment is tailored by adjusting treatment parameters of a pulsed iorl beam (11) to a duration less than or equal to 1000 ns and a repetition rate of less than 1 Hz.

Procédés et appareil permettant de traiter des surfaces (13) de matériau à l'aide d'un faisceau ionique (11) pulsé à répétition. En particulier, on adapte le traitement en ajustant les paramètres de traitement d'un faisceau ionique pulsé (11) pour obtenir une durée inférieure ou égale à 1000 ns et un rythme de répétition inférieur à 1 Hz.

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