Method of making synthetic diamond film with reduced bowing

Details Method of making synthetic diamond film with reduced bowing Method of making synthetic diamond film with reduced bowing

Category

C - Chemistry, Metallurgy

Subcategory

01

Subsubcategory

B

IPC codes

C01B 31/06 (2006.01) C23C 16/01 (2006.01) C23C 16/27 (2006.01)

Type

Patent

Patent number

CA 2153184

Description

A method for synthesizing generally flat free- standing diamond, comprising the steps of providing a deposition chamber, providing a deposition surface in said deposition chamber, said deposition surface having a concave contour, directing a plasma toward said concave deposition surface, the plasma including hydrogen and a hydrocarbon, such that synthetic diamond is formed on said concave deposition surface and releasing said synthetic diamond from said concave deposition surface to obtain free standing diamond.

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