Process for the purification of silane

B - Operations – Transporting – 01 – D

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B01D 53/04 (2006.01) C01B 33/04 (2006.01)

Patent

CA 1085587

PROCESS FOR THE PURIFICATION OF SILANE Abstract of the Disclosure A process for the purification of a mixture of silane and impurities comprising passing the mixture through a succession of zones connected in series, in a closed system, according to the following steps: (a) passing the mixture, in gaseous form, through a zone containing porous, granular charcoal as an adsorbent at a temperature in the range of about minus 40°C to about minus 80°C to provide a mixture of silane and remaining impurities in gaseous form; (b) passing the gaseous mixture from step (a) through a zone containing porous, granular magnesium silicate as an adsorbent at a temperature in the range of about minus 40°C to about minus 80°C to provide a mixture of silane and remaining impurities in gaseous form; (c) passing the gaseous mixture from step (b) into a distillation zone in such a manner that the impurities are removed overhead in gaseous form and at least about 95 per cent by weight of the silane is converted to liquid bottoms; and (d) recovering the bottoms. S P E C I F I C A T I O N

290831

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