Biosensor matrix and method for making same

Details Biosensor matrix and method for making same Biosensor matrix and method for making same

G - Physics

01

N

G01N 27/00 (2006.01) B01L 3/00 (2006.01) B81B 3/00 (2006.01) G01N 5/00 (2006.01)

Patent

CA 2445285

The invention concerns a biosensor matrix comprising a substrate made of semiconductor material. It has a planar main surface (4) and cavities (8), arranged from the surface (10) opposite said planar surface (4), defining between the base (9) of said cavities and the main planar surface (4) deformable structures (40) which include at least a piezoresistive or piezoelectric element (44). The method for making such a matrix uses manufacturing techniques adapted to microtechnologies and nanotechnologies, preferably with a localised pre-amorphisation of the surface of the substrate prior to implantation of the piezoresistive elements (44), which is followed by annealing.

L'invention concerne une matrice de biocapteurs comprenant un substrat en matériau semi-conducteur. Elle présente une surface principale plane (4) ainsi que des cavités (8), ménagées à partir d'une surface (10) opposée à ladite surface plane (4), définissant entre le fond (9) desdites cavités et la surface principale plane (4) des structures déformables (40) qui comportent au moins un élément sensible piézorésistif (44) ou piézoélectrique. Le procédé de fabrication met en oeuvre des techniques de fabrication propres aux micro et nanotechnoloqies, avec préférentiellement une préamorphisation localisée de la surface du substrat avant implantation des éléments piézorésistifs (44), laquelle est suivie d'un recuit.

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