Optical spectroscopy device and method for its manufacture

Details Optical spectroscopy device and method for its manufacture Optical spectroscopy device and method for its manufacture

G - Physics

01

N

G01N 21/25 (2006.01) G01J 3/02 (2006.01) G01J 3/44 (2006.01) G01J 3/443 (2006.01) G01N 21/64 (2006.01)

Patent

CA 2388350

Disclosed is an optical spectroscopy device (1) and a method for the production thereof. The inventive device comprises at least one light source (8) and at least one integrated spectrometer (3). The optical components of the at least one spectrometer (3) are optical microcomponents (11, 13, 16, 19, 20, 21) which are integrated into the top and/or bottom side (9, 12) of a support plate (2). According to the inventive method, at least one light source (8) is arranged on a support plate (2) and at least one spectrometer (3) is monolithically produced in a three dimensionally integrated form on said support plate (2). The spectrometer produced according to the inventive method (3) is made from optical microcomponents (11, 13, 16, 19, 20, 21).

Dispositif (1) de spectroscopie optique et procédé de fabrication dudit dispositif qui comporte au moins une source de lumière (8) et au moins un spectromètre (3) fabriqué de manière intégrée. Les composants optiques du spectromètre (3) sont des micro-composants optiques (11, 13, 16, 19, 20, 21) qui sont intégrés sur la face supérieure et/ou sur la face inférieure (9, 12) d'une plaque de support (2). Selon ledit procédé, au moins une source de lumière (8) est placée sur une plaque de support (2) et au moins un spectromètre (3) est produit de manière monolithique selon une intégration tridimensionnelle sur la plaque de support (2). Le spectromètre (3) fabriqué selon la présente invention est ainsi constitué de micro-composants optiques (11, 13, 16, 19, 20, 21).

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