Thin-film spectroscopic sensor

Details Thin-film spectroscopic sensor Thin-film spectroscopic sensor

G - Physics

01

N

G01N 21/00 (2006.01) G01N 21/55 (2006.01) G01J 3/18 (2006.01) G01J 3/42 (2006.01) G01N 21/80 (2006.01)

Patent

CA 2072588

2072588 9110122 PCTABS00006 There is disclosed an integrated spectrometer for chemical analysis by evanescent electromagnetic radiation absorption in a reaction volume. The spectrometer comprises a noninteractive waveguide (7), a substrate (6), an entrance grating (4) and an exit grating (5), an electromagnetic radiation source (1), and an electromagnetic radiation sensing device (2). There is further disclosed a chemical sensor to determine the pressure and concentration of a chemical species in a mixture comprising an interactive waveguide (7), a substrate (6), an entrance grating (4) and an exit grating (5), an electromagnetic radiation source (1), and an electromagnetic radiation sensing device (2).

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