Measuring system for determining scattering parameters

Details Measuring system for determining scattering parameters Measuring system for determining scattering parameters

G - Physics

01

R

G01R 1/067 (2006.01) G01R 27/28 (2006.01)

Patent

CA 2738717

The invention relates to a measuring system for determining scatter parameters of an electrical measurement object (40, 42, 44, 46, 48) on a substrate (38), having a measuring machine (10) having at least one measuring channel (18, 20, 22, 24) and at least one measuring probe (28) electrically connected to at least one measuring channel (18, 20, 22, 24) and designed for non-contacting or contacting connection to an electrical signal line (50) of the electrical measurement object (40, 42, 44, 46, 48) in the electronic circuit. According to the invention, a first positioning device (30) is provided for at least one measuring probe (28), wherein at least one sensor (34) detects a position of at least one measuring probe (28) and outputs a position signal.

Linvention concerne un système de mesure permettant de déterminer les paramètres de dispersion dun objet électrique à mesurer (40, 42, 44, 46, 48) sur un substrat (38), à laide dun appareil de mesure (10) ayant au moins un canal de mesure (18, 20, 22, 24) et au moins une sonde de mesure (28) qui est électriquement reliée à au moins un canal de mesure (18, 20, 22, 24) et qui est conçue pour relier avec ou sans contact une ligne de signal électrique (50) de lobjet électrique à mesurer (40, 42, 44, 46, 48) dans le circuit électronique. Selon linvention, il est prévu pour au moins une sonde de mesure (28) un premier dispositif de positionnement (30), au moins un capteur (34) étant prévu pour détecter une position dau moins une sonde de mesure (28) et pour délivrer un signal de position.

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