Amorphous metal film and process for applying same

C - Chemistry – Metallurgy – 23 – C

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C23C 14/14 (2006.01) C22C 19/03 (2006.01) C23C 14/34 (2006.01)

Patent

CA 2674646

Ni-based refractory metallic glass coatings utilizing periodic table group five element vanadium in combination with other group 5 or 6 elements, particularly tantalum, chromium, or molybdenum, can be formed via co-sputtering with proper control of carrier gas pressure and/or bias voltage. The alloy forms fully amorphous coatings that are not predicted by the usual glass forming ability (GFA) criteria. These alloys exhibit high thermal stability, hardness values greater than TiN, smooth surface finishes, and a wide processing window.

L'invention concerne des revêtements de verre métallique réfractaires à base de Ni utilisant du vanadium du groupe cinq du tableau périodique en conjonction avec d'autres éléments de groupe 5 ou 6, en particulier le tantale, le chrome ou le molybdène. Lesdits revêtements peuvent être formés par co-pulvérisation cathodique avec le contrôle judicieux de la tension de polarisation et/ou de la pression du gaz porteur. L'alliage forme des revêtements complètement amorphes qui n'obéissent pas aux règles habituelles d'aptitude à la vitrification(GFA). Ces alliages présentent une stabilité thermique élevée, des valeurs de dureté supérieures à TiN, de lisses finitions de surface et une large fenêtre de traitement.

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