Apparatus for coating substrates in a vacuum

Details Apparatus for coating substrates in a vacuum Apparatus for coating substrates in a vacuum

H - Electricity

01

J

H01J 37/34 (2006.01) H01L 21/363 (2006.01) H05H 1/46 (2006.01)

Patent

CA 2184432

An alternating-current source (2) is connected to two cathodes (6,7) which cooperate electrically with targets which are sputtered in a gas discharge while a process gas is introduced in a vacuum chamber (15). A network formed of a transformer (3) and additional coils (5, 12, 13) and condensers (4, 8, 9, 10, 11) acts as a filter to assure a stable coating process.

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