G - Physics – 01 – J
Patent
G - Physics
01
J
G01J 5/12 (2006.01) G02B 23/12 (2006.01) H01L 27/16 (2006.01) H04N 5/33 (2006.01)
Patent
CA 2175487
An infrared imaging array of thermoelectric sensors has a plurality of electrically connected microbridge subsensors arranged in subarrays comprising each sensor of the array. Each subsensor consists of a short span microbridge lying across a relatively small pit. The use of many of such subsensors for each sensor rather than a single large area microbridge sensor for a single pixel allows each pixel to be made large enough to give good sensitivity in either vacuum- or gas-filled designs, and at the same time avoid the reduced fabrication yield which results when sensors span large pits.
Matrice de capteurs infrarouges thermosensibles faite de multiples sous-capteurs micropontés disposés en sous-matrices constitutives de chacun des capteurs. Chacun des sous-capteurs consiste en un micropont de faible portée enjambant une cavité relativement petite. L'emploi par pixel d'un capteur composé de multiples sous-capteurs au lieu d'un capteur microponté d'un seul gros bloc donne aux pixels une dimension suffisante pour leur conférer une bonne sensibilité dans le vide ou dans les systèmes sous gaz, tout en éliminant le faible rendement de fabrication inhérent aux capteurs enjambant des cavités de grandes dimensions.
Higashi Robert E.
Rhodes Michael Lee
Wood Roland Andrew
Honeywell Inc.
Smart & Biggar
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