Thin film heating element

Details Thin film heating element Thin film heating element

H - Electricity

05

B

H05B 3/14 (2006.01) H05B 3/12 (2006.01)

Patent

CA 2344486

A thin film heating element capable of withstanding power densities of 10-20 watts cm-2 and/or temperatures up to 650~C is disclosed. The preferred form of the heating element includes a layer of tin oxide doped with relatively large quantities of cerium and lanthanum deposited on an insulating substrate by pyrolysis of a solution of monobutyl tin trichloride containing the above rare earth elements. The solution and subsequent oxide layer further include donor and acceptor elements such as antimony and zinc to enhance the conductivity of the heating element.

L'invention concerne un élément chauffant à film mince, pouvant résister à des densités de puissance de 10-20 watts cm?-2¿ et/ou à des températures pouvant atteindre 650 ·C. Dans sa forme préférée, ledit élément chauffant se compose d'une couche d'oxyde d'étain dopée à l'aide de quantités relativement importantes de cérium et de lanthanum, déposée sur un substrat isolant, par pyrolyse d'une solution de trichlorure de monobutylétain contenant les éléments du groupe des terres rares. La solution et la couche d'oxyde subséquente comprennent, par ailleurs, des éléments donneurs et accepteurs tels que l'antimoine et le zinc, ce qui a pour effet d'augmenter la conductivité dudit élément chauffant.

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