C - Chemistry – Metallurgy – 23 – C
Patent
C - Chemistry, Metallurgy
23
C
C23C 16/00 (2006.01)
Patent
CA 2586969
This invention comprises an apparatus for the deposition of thin layers upon a substrate for the production of photovoltaic cells wherein the individual reaction chambers are separated from each other by low pressure isolation zones which prevent cross contamination of adjacent reaction chambers and control pressure levels in each reaction chamber while, at the same time, allowing the uninterrupted transfer of a substrate from one reaction chamber to the next without any mechanical obstruction.
L'invention concerne un appareil permettant de déposer des couches minces sur un substrat afin de produire des photopiles dans lesquelles les chambres de réaction individuelles sont séparées les unes des autres par des zones d'isolation basse pression qui empêchent une contamination croisée des chambres de réaction adjacentes, et commandent les niveaux de pression dans chaque chambre de réaction tout en permettant simultanément le transfert ininterrompu d'un substrat d'une chambre de réaction à la suivante sans obstruction mécanique quelconque.
Adams Patent & Trademark Agency
Daystar Technologies Inc.
LandOfFree
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