Valve mechanism for a vacuum valve

Details Valve mechanism for a vacuum valve Valve mechanism for a vacuum valve

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16

K

F16K 31/122 (2006.01) F16K 3/02 (2006.01) F16K 3/18 (2006.01) F16K 3/36 (2006.01) F16K 51/02 (2006.01)

Patent

CA 2149986

Described is a valve mechanism for a vacuum valve, particularly a particle-free valve, for controlling gas flows, in which the entire drive mechanism for a valve disk is disposed in a chamber outside of the chamber exposed to the vacuum.

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