High accuracy beam blanker

Details High accuracy beam blanker High accuracy beam blanker

H - Electricity

01

L

H01L 21/027 (2006.01) H01J 3/26 (2006.01) H01J 37/04 (2006.01)

Patent

CA 2069767

The accuracy of a double-deflection beam blanker is dramatically improved for all blanker voltages by using provided, closed-form, trajectory equations to determine the blanker geometric parameters and compensating for fringe-field affects in order to precisely determine the delay line length for control of an electron or ion beam. This delay line length is maintained by placing alignment apertures above and below the blanker.

Affiliated with

Also associated with

Rating

High accuracy beam blanker does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with High accuracy beam blanker, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High accuracy beam blanker will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1705292