Micromechanical relay having a hybrid drive

Details Micromechanical relay having a hybrid drive Micromechanical relay having a hybrid drive

H - Electricity

01

H

H01H 57/00 (2006.01) H01H 59/00 (2006.01) H01H 1/20 (2006.01) H01H 1/50 (2006.01)

Patent

CA 2156257

The micromechanical relay has an armature (53) which is etched out from an armature substrate (52), is in the form of a tongue and is elastically connected to the armature substrate, and forms an electrostatic drive with a base electrode (58) of a base substrate (51) located underneath. In addition, a piezo-layer (60) is provided on the armature (53), which piezo-layer (60) acts as a bending transducer and forms an additional drive. When a voltage is applied to the electrodes of the armature (53), of the base substrate (51) and of the piezo-layer (60), the armature is attracted toward the base substrate and then rests over a large area on the base, closing at least one contact (55, 56). At the same time, the different characteristics of the electrostatic drive on the one hand and of the piezo-drive on the other hand are superimposed such that a strong attraction force is produced at the start of the armature movement, and a strong contact force is produced after the armature has been attracted.

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