Electrostatic force nulling accelerometer

G - Physics – 01 – P

Patent

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73/42

G01P 15/00 (2006.01) G01P 15/125 (2006.01) G01P 15/13 (2006.01)

Patent

CA 2010437

Electrostatic Force Nulling Accelerometer Arrangement and Method Abstract of the Disclosure An accelerometer arrangement includes an acceleration sensor that includes two capacitor plates having respective parallel mutually facing major surfaces which bound a sensing gap therebetween. A plate-shaped electrically chargeable proof mass is resiliently mounted in the gap in parallelism with the major surfaces for displacement in response to the action of acceleration forces thereon out of a substantially central rest position toward one or the other of the major surfaces depending on the direction of the acceleration forces. An electrical potential difference is established between the capacitor plates to generate respective electrostatic fields between the capacitor plates and the proof mass which cause a proof mass electrical potential variation having a magnitude and sense depending on the extent and direction of the displacement of the proof mass out of its rest position. The variation is evaluated and an electrical control signal having a voltage that is proportionate to the variation and sufficient for electrostatic forces caused thereby between the proof mass and the capacitor plates to return the proof mass to the rest position thereof against the action of the acceleration forces thereon is generated and supplied to the proof mass. H-1960gc - 17 -

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