Methods of making carbon nanotube films, layers, fabrics,...

C - Chemistry – Metallurgy – 23 – C

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C23C 16/26 (2006.01) C23C 16/02 (2006.01) C23C 16/56 (2006.01) D01F 9/12 (2006.01) D01F 9/127 (2006.01) H01L 21/443 (2006.01) H01L 21/768 (2006.01)

Patent

CA 2512648

Methods of Making Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements and articles are disclosed. Carbon nanotube growth catalyst (350) is applied on to a surface of a substrate. The substrate is subjected to a chemical vapor deposition (370) of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst (350) on to a surface of a water substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition (370) of carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the water and in which the fabric is substantially uniform density.

L'invention concerne des procédés de fabrication de films, couches, tissus, rubans, éléments et articles de nanotubes de carbone. Selon l'invention, un catalyseur favorisant la croissance de nanotubes de carbone (350) est appliqué sur une surface d'un substrat. Ce substrat est soumis à un dépôt chimique en phase vapeur (CVD) (370) à partir d'un gaz contenant du carbone pour permettre la croissance d'un non-tissé de nanotubes de carbone. Des parties de ce non-tissé sont retirées sélectivement d'après un motif défini de façon à créer l'article. Un non-tissé de nanotubes de carbone peut être réalisé par application d'un catalyseur favorisant la croissance de nanotubes de carbone (350) sur la surface d'un substrat sous forme de tranche pour créer une monocouche de catalyseur dispersée. Ce substrat est soumis à un CVD (370) à partir d'un gaz contenant du carbone pour permettre la croissance d'un non-tissé de nanotubes de carbone en contact et recouvrant la surface de la tranche, le non-tissé présentant une densité sensiblement uniforme.

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