Nanometer-sized silica-coated alpha-alumina abrasives in...

Details Nanometer-sized silica-coated alpha-alumina abrasives in... Nanometer-sized silica-coated alpha-alumina abrasives in...

C - Chemistry, Metallurgy

09

K

C09K 3/14 (2006.01) C09G 1/02 (2006.01) H01L 21/321 (2006.01)

Patent

CA 2382724

CMP processes and products employ aluminas comprising alpha alumina particles having a particle width of less than 50 nanometers and a surface area of at least 50 m2/gm.

L'invention concerne des procédés et des produits de planarisation mécanico-chimique qui utilisent des particules d'alpha-alumine ayant une largeur de particule inférieure à 50 nanomètres et une surface d'au moins 50 m2/g.

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