Continuous chemical vapor deposition process and process...

Details Continuous chemical vapor deposition process and process... Continuous chemical vapor deposition process and process...

C - Chemistry, Metallurgy

23

C

C23C 16/00 (2006.01) B32B 1/00 (2006.01) B32B 3/02 (2006.01) C23C 16/26 (2006.01) C23C 16/46 (2006.01) C23C 16/54 (2006.01) C23C 16/44 (2006.01)

Patent

CA 2492597

An apparatus and process is provided for continuously depositing solid carbon at atmospheric pressure onto the surfaces and in the porosity of a thin substrate material.

L'invention concerne un appareil et un procédé pour déposer en continu du carbone solide à pression atmosphérique sur les surfaces et dans les pores d'un matériau à substrat fin.

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