Lifting device for substrates

Details Lifting device for substrates Lifting device for substrates

B - Operations, Transporting

65

H

B65H 1/14 (2006.01) B23Q 7/00 (2006.01) B23Q 7/10 (2006.01) G11B 7/26 (2006.01) H01L 21/00 (2006.01)

Patent

CA 2359193

The aim of the invention is to make it as easy as possible to change a spindle in a lifting device (2) for substrates, which device comprises a support (10). To this end the support is configured such that it can be made to engage the substrate holder (25) by rotation or by pivoting.

L'invention vise à faciliter le plus possible le changement de broche dans un dispositif de levage (2) pour des substrats, comportant un support (10). A cet effet, ce dernier est conçu de sorte qu'il vienne coopérer, par rotation ou pivotement, avec le porte-substrat (25).

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