Methods of using thin metal layers to make carbon nanotube...

Details Methods of using thin metal layers to make carbon nanotube... Methods of using thin metal layers to make carbon nanotube...

C - Chemistry, Metallurgy

23

C

C23C 14/04 (2006.01) C23C 16/02 (2006.01) C23C 16/04 (2006.01) C23C 16/26 (2006.01) C23C 16/56 (2006.01) D01F 9/127 (2006.01)

Patent

CA 2512387

Methods of using thin metal layers to make Carbon Nanotube Films, Layers, Fabrics, Ribbons, Elements, and Articles are disclosed. Carbon nanotube growth catalyst is applied onto a surface of a substrate, including one or more thin layers of metal. The substrate is subjected to a chemical vapor deposition (160) of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes. Portions of the non-woven fabric are selectively removed according to a defined pattern to create the article. A non-woven fabric of carbon nanotubes may be made by applying carbon nanotube growth catalyst onto a surface of a wafer substrate to create a dispersed monolayer of catalyst. The substrate is subjected to a chemical vapor deposition of a carbon-containing gas to grow a non-woven fabric of carbon nanotubes in contact and covering the surface of the wafer and in which the fabric has a substantially uniform density.

L'invention porte sur des procédés d'utilisation de couches métalliques minces pour former des nanotubes, des films, des couches, des tissus, des rubans, des éléments et des articles de carbone. A cet effet on applique un catalyseur de croissance à la surface d'un substrat comportant une ou plusieurs couches minces de métal, puis on soumet le substrat à un dépôt chimique en phase vapeur (160) d'un gaz à teneur en carbone pour y faire croître un non-tissé de nanotubes de carbone dont on retire des parties sélectionnées d'un motif particulier pour créer l'article. On peut en outre former un non tissé en appliquant un catalyseur de croissance à la surface d'un substrat de tranche de silicium pour y créer une monocouche dispersée de catalyseur. Le substrat est soumis à un dépôt en phase vapeur d'un gaz à teneur en carbone pour y faire croître un non-tissé de nanotubes de carbone en contact avec la tranche et en recouvrant la surface, ledit non tissé présentant une densité sensiblement uniforme.

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