Method of manufacturing micro-components

Details Method of manufacturing micro-components Method of manufacturing micro-components

B - Operations, Transporting

32

B

B32B 15/01 (2006.01) B01J 19/00 (2006.01) B81C 1/00 (2006.01) F28D 9/00 (2006.01) F28F 3/04 (2006.01) G03F 7/00 (2006.01) H01M 8/06 (2006.01)

Patent

CA 2372938

The invention relates to a method for producing microcomponents with at least one individual layer, which has functional layers (3) on the walls of inner structures such as flow channels. The aim of the invention is to produce microcomponents that are suitable for a variety of different applications in chemical reaction engineering, for heat-exchange applications, for mixing substances or for evaporating liquids. In particular, the inventive microcomponents should not present any problems in terms of the tightness of the flow channels. To this end, the inventive method comprises the following steps: A) producing the at least one individual layer by a) producing a first metal layer or metal film (1), b) forming the inner structures in and/or on said first metal layer or metal film (1) using suitable etching techniques and/or metal application techniques, and c) forming the functional layers (3) on the walls of the inner structures only, and then B) stacking and joining the one individual layer to a segment that closes the inner structures or joining several individual layers together and to the closing segment.

Procédé de production de microéléments à une couche unique au moins, qui possèdent des couches fonctionnelles (3) sur les parois de structures internes, par exemple de canaux d'écoulement. Lesdits microéléments sont appropriés pour une pluralité d'applications diverses dans le domaine des réactions chimiques, pour l'échange de chaleur, le mélange de substances ou l'évaporation de liquides. Lesdits microéléments doivent en particulier ne présenter aucun problème concernant l'étanchéité des canaux d'écoulement. Ledit procédé consiste (A) à fabriquer la couche unique au moins par (a) fabrication d'une première couche de métal ou d'un film métallique (1), (b) formation des structures internes dans et/ou sur la première couche de métal ou film métallique (1) par des procédés appropriés d'attaque et/ou d'application de métal et (c) formation des couches fonctionnelles (3) exclusivement sur les parois des structures internes, puis (B) à empiler et à assembler la couche unique avec un segment fermant les structures internes ou plusieurs couches uniques entre elles et avec le segment de fermeture.

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